申请人:ECHIGO Masatoshi
公开号:US20110165516A1
公开(公告)日:2011-07-07
A radiation-sensitive composition containing 1 to 80% by weight of a solid component and 20 to 99% by weight of a solvent. The solid component contains a compound B which has (a) a structure derived from a polyphenol compound A by introducing an acid-dissociating group to at least one phenolic hydroxyl group of the polyphenol compound A which is synthesized by a condensation between a di- to tetrafunctional aromatic ketone or aromatic aldehyde each having 5 to 36 carbon atoms with a compound having 1 to 3 phenolic hydroxyl groups and 6 to 15 carbon atoms, and (b) a molecular weight of 400 to 2000. The composition containing the compound B is useful as an acid-amplified, non-polymeric resist material, because it is highly sensitive to radiation such as KrF excimer lasers, extreme ultraviolet rays, electron beams, and X-rays, and provides resist patterns with a high resolution, high heat resistance, and high etching resistance.
一种辐射敏感组合物,含有1-80重量%的固体组分和20-99重量%的溶剂。固体组分包含化合物B,其具有(a)从多酚化合物A导出的结构,通过在多酚化合物A的至少一个酚羟基上引入酸解离基团而合成,多酚化合物A是由具有5至36个碳原子的二元至四元芳香酮或芳香醛与具有1至3个酚羟基和6至15个碳原子的化合物之间的缩合反应合成的;(b)分子量为400至2000。含有化合物B的组合物可用作酸放大,非聚合物抗蚀材料,因为它对KrF准分子激光、极紫外线、电子束和X射线等辐射非常敏感,并提供具有高分辨率、高耐热性和高蚀刻抗性的抗蚀图案。