申请人:Chisso Corporation
公开号:EP0337698A2
公开(公告)日:1989-10-18
A photosensitive polymer has an inherent viscosity of 0.1 to 5 dl/g and contains repeating units of the formula:
in which R¹ is a trivalent or tetravalent carbocyclic aromatic group or hetrocyclic group; R² is an aliphatic group having at least 2 carbon atoms, an alicyclic group, an aromatic aliphatic group, a carbocyclic aromatic group, a heterocyclic or a polysiloxane group; R³ is a monovalent organic group having a photosensitive unsaturated group; R⁴ is a monovalent organic group; m is 1 or 2; n is 0 or 1; and the sum of m and n is 1 or 2.
The polymer may be prepared by reacting a poly(amide)isoimide with a secondary amine containing a photosensitive unsaturated group. A photosensitive polymer composition comprises the polymer, a photopolymerization initiator, a sensitizer, a diazide compound, a compound having a carbon-carbon double bond and a solvent. A method for forming a patterned poly(amide)imide film comprises applying the composition to a substrate, prebaking it, irradiating it through a patterned mask, developing, drying and postbaking it at a temperature of 200 to 500°C.
一种光敏聚合物的固有粘度为 0.1 至 5 dl/g,含有式中的重复单元:
其中 R¹ 是三价或四价碳环芳香基团或七环基团;R² 是至少有 2 个碳原子的脂族基团、脂环基团、芳香脂族基团、碳环芳香基团、杂环基团或聚硅氧烷基团;R³ 是具有光敏不饱和基团的一价有机基团;R⁴ 是一价有机基团;m 是 1 或 2;n 是 0 或 1;m 与 n 之和是 1 或 2。
聚合物可通过聚(酰胺)异亚胺与含有光敏不饱和基团的仲胺反应制备。光敏聚合物组合物由聚合物、光聚合引发剂、敏化剂、重氮化物、具有碳碳双键的化合物和溶剂组成。形成图案化聚(酰胺)酰亚胺薄膜的方法包括将组合物涂在基底上,预烘烤,通过图案化掩膜照射,显影,干燥,在 200 至 500°C 的温度下进行后烘烤。