METAL-CONTAINING COMPOUND, PROCESS FOR PRODUCING THE SAME, METAL-CONTAINING THIN FILM, AND METHOD OF FORMING THE SAME
申请人:TOSOH CORPORATION
公开号:EP1921061A1
公开(公告)日:2008-05-14
A compound having good thermal stability and appropriate vaporization characteristic as a raw material of CVD method or ALD method, its production method, a thin film formed using the compound as a raw material, and its formation method are provided.
A compound represented by the general formula (1) is produced by reacting a compound represented by the general formula (2) and a compound represented by the general formula (3), and a metal-containing thin film is formed using the same as a raw material.
[Chem. 3] Mp (NR4R5) q (3)
(In the formulae, M represents a Group 4 atom, an aluminum atom, a gallium atom or the like; n is 2 or 3 in some cases, R1 and R3 represent an alkyl group having from 1 to 6 carbon atoms, or the like; R2 represents an alkyl group having from 1 to 6 carbon atoms, or the like; R4 and R5 represent an alkyl group having from 1 to 4 carbon atoms, or the like; X represents a hydrogen atom, a lithium atom or a sodium atom; p is 1 or 2 in some cases; and q is 4 or 6 in some cases).
本发明提供了一种作为 CVD 法或 ALD 法原料的具有良好热稳定性和适当汽化特性的化合物、其生产方法、以该化合物为原料形成的薄膜及其形成方法。
通过通式(2)表示的化合物和通式(3)表示的化合物反应制得通式(1)表示的化合物,并以其为原料形成含金属薄膜。
[化学式 3] Mp (NR4R5) q (3)
(式中:M 代表第 4 族原子、铝原子、镓原子或类似物;n 在某些情况下为 2 或 3;R1 和 R3 代表具有 1 至 6 个碳原子的烷基或类似物;R2 代表具有 1 至 6 个碳原子的烷基或类似物;R4 和 R5 代表具有 1 至 4 个碳原子的烷基或类似物;X 代表氢原子、锂原子或钠原子;p 在某些情况下为 1 或 2;q 在某些情况下为 4 或 6)。