NOVEL PHOTOACID GENERATOR, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:OHASHI Masaki
公开号:US20090061358A1
公开(公告)日:2009-03-05
Photoacid generators generate sulfonic acids of formula (1a) or (1c) upon exposure to high-energy radiation.
R
1
—COOCH(CF
3
)CF
2
SO
3
+
H
+
(1a)
R
1
—O—COOCH(CF
3
)CF
2
SO
3
−
H
+
(1c)
R
1
is a C
20
-C
50
hydrocarbon group having a steroid structure. The photoacid generators are compatible with resins and can control acid diffusion and are thus suited for use in chemically amplified resist compositions.
Novel photoacid generators, resist compositions, and patterning process
申请人:Ohsawa Youichi
公开号:US20080085469A1
公开(公告)日:2008-04-10
Photoacid generators generate sulfonic acids of formula (1a) upon exposure to high-energy radiation.
RC(═O)R
1
—COOCH(CF
3
)CF
2
SO
3
−
H
+
(1a)
R is hydroxyl, alkyl, aryl, hetero-aryl, alkoxy, aryloxy or hetero-aryloxy, R
1
is a divalent organic group which may have a heteroatom (O, N or S) containing substituent, or R
1
may form a cyclic structure with R. The photoacid generators are compatible with resins and can control acid diffusion and are thus suited for use in chemically amplified resist compositions.
Fourteen 4-mercaptoimidazoles derived from the naturally occurring family of antioxidants, the ovothiols, have been synthesized by cyclization of thioamides with trimethylsilyl trifluoromethanesulfonate (triflate). These compounds have been assayed for their radical-scavenging activity.
NOVEL SULFONATE SALTS AND DERIVATIVES, PHOTOACID GENERATORS, RESIST COMPOSITIONS, AND PATTERNING PROCESS
申请人:KOBAYASHI Katsuhiro
公开号:US20070298352A1
公开(公告)日:2007-12-27
Sulfonate salts have the formula: HOCH
2
CH
2
CF
2
CF
2
SO
3
−
M
+
wherein M
+
is a Li, Na, K, ammonium or tetramethylammonium ion. Onium salts, oxime sulfonates and sulfonyloxyimides derived from these salts are effective photoacid generators in chemically amplified resist compositions.
Novel sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process
申请人:Ohsawa Youichi
公开号:US20080318160A1
公开(公告)日:2008-12-25
Sulfonate salts have the formula:
CF
3
—CH(OCOR)—CF
2
SO
3
−
M
+
wherein R is C
1
-C
20
alkyl or C
6
-C
14
aryl, and M
+
is a lithium, sodium, potassium, ammonium or tetramethylammonium ion. Onium salts, oximesulfonates and sulfonyloxyimides and other compounds derived from these sulfonate salts are effective photoacid generators in chemically amplified resist compositions.