A method for the synthesis of sulfonyl chlorides and bromides from the corresponding sulfonate salts is described. The method gives good yields of the acid halides under very mild conditions, and is compatible with both acid and base sensitive functionalities.
POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
申请人:NISHI Tsunehiro
公开号:US20100062374A1
公开(公告)日:2010-03-11
A positive resist composition comprises (A) a resin component which becomes soluble in an alkaline developer under the action of an acid and (B) an acid generator. The resin (A) is a polymer comprising recurring units containing a non-leaving hydroxyl group represented by formula (1) wherein R
1
is H, methyl or trifluoromethyl, X is a single bond or methylene, m is 1 or 2, and the hydroxyl group attaches to a secondary carbon atom. The composition is improved in resolution when processed by lithography.
NOVEL PHOTOACID GENERATOR, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Ohsawa Youichi
公开号:US20090246694A1
公开(公告)日:2009-10-01
Photoacid generators generate sulfonic acids of formula (
1
a) upon exposure to high-energy radiation.
ROC(═O)R
1
—COOCH
2
CF
2
SO
3
−
H
+
(1a)
RO is OH or C
1
-C
20
organoxy, R
1
is a divalent C
1
-C
20
aliphatic group or forms a cyclic structure with RO. The photoacid generators are compatible with resins and can control acid diffusion and are thus suited for use in chemically amplified resist compositions.
Isothiazolecarboxylic acid derivatives and their use as microbicides
申请人:——
公开号:US20030176477A1
公开(公告)日:2003-09-18
Novel isothiazolecarboxylic acid derivatives of the formula (I), in which A, Q, Z and k have the meanings mentioned in the specification, processes for the preparation of the new compounds and their use as microbicides.
Facile one-pot synthesis of sulfonyl fluorides from sulfonates or sulfonic acids
作者:Ying Jiang、Njud S. Alharbi、Bing Sun、Hua-Li Qin
DOI:10.1039/c9ra02531f
日期:——
abundant and inexpensive sulfonates (or sulfonic acids) to the highly valuable sulfonyl fluorides was developed. This new protocol features mild reaction conditions using readily available and easy-to-operate reagents. A diverse set of sulfonyl fluorides was prepared facilitating the enrichment of the sulfonyl fluoride library.
Novel isothiazole derivatives of the formula (I) wherein A represents a group selected from (1), (2) and (3) in which R
1
, R
2
, R
3
, R
4
and R
5
have the meanings given in the specification processes for the preparation of the novel compounds and their use as microbicides.