申请人:Clariant International Ltd.
公开号:US06358665B1
公开(公告)日:2002-03-19
Disclosed is a chemically amplified radiation sensitive composition containing a hydroxystyrene resin and an onium salt precursor which generates a fluorinated alkanesulfonic acid as a photoacid generator, wherein the photoacid generator is a sulfonium or iodonium salt of a fluorinated alkane sulfonic acid, represented by formula (I):
Y+ASO3− (I)
wherein A represents CF3CHFCF2 or CF3CF2CF2CF2; and Y represents
wherein R1, R2, R3, R4, and R5 each independently represent an alkyl group, a monocyclic or bicyclic alkyl group, a cyclic alkylcarbonyl group, a phenyl group, a naphthyl group, an anthryl group, a peryl group, a pyryl group, a thienyl group, an aralkyl group, or an arylcarbonylmethylene group, or any two of R1, R2, and R3 or R4 and R5 together represent an alkylene or an oxyalkylene which forms a five- or six-membered ring together with the interposing sulfur or iodine, said ring being optionally condensed with aryl groups.
本发明涉及一种化学增感放射敏感组合物,包含羟基苯乙烯树脂和生成氟代烷基磺酸的硫离子或碘离子盐前体作为光酸发生剂,其中所述光酸发生剂是由式(I)所表示的氟代烷基磺酸的硫离子或碘离子盐制成:Y+ASO3− (I)其中,A代表CF3CHFCF2或CF3CF2CF2CF2;Y代表R1、R2、R3、R4和R5各自独立地代表烷基、单环或双环烷基、环烷基羰基、苯基、萘基、蒽基、苯并环戊二烯基、吡喃基、噻吩基、芳烷基或芳基羰基亚甲基组,或R1、R2和R3中的任意两个或R4和R5中的任意两个共同代表形成五元或六元环的烷基或氧烷基,其中硫或碘作为中间原子,所述环可以选择性地与芳基团融合。