Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
申请人:Shigematsu Junji
公开号:US20080086014A1
公开(公告)日:2008-04-10
The present invention provides a salt represented by the formula (I):
wherein X represents a C3-C30 divalent group containing at least one divalent alicyclic hydrocarbon group, and at least one —CH
2
— in the C3-C30 divalent group may be substituted with —O— or —CO—,
Y represents a C3-C30 cyclic hydrocarbon group which may be substituted with at least one group selected from a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group and a cyano group, and at least one —CH
2
— in the C3-C30 cyclic hydrocarbon group may be substituted with —O— or —CO—,
Q
1
and Q
2
each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and A
+
represents an organic counter ion.
本发明提供了一种由公式(I)表示的盐:其中X代表含至少一个二价脂环烃基的C3-C30二价基团,并且C3-C30二价基团中的至少一个—CH2—可以被—O—或—CO—取代,Y代表一个C3-C30环烃基,该环烃基可以至少被选自C1-C6烷氧基、C1-C4全氟烷基、C1-C6羟基烷基、羟基和氰基的至少一个取代基取代,并且C3-C30环烃基中的至少一个—CH2—可以被—O—或—CO—取代,Q1和Q2各自独立地代表一个氟原子或一个C1-C6全氟烷基,以及A+代表一个有机反离子。