ENERGY-SENSITIVE COMPOSITION, CURED PRODUCT, AND FORMING METHOD OF PATTERNED CURED PRODUCT
申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20220146929A1
公开(公告)日:2022-05-12
An energy-sensitive composition including a polysilane, a base generator, and a solvent, the base generator including a compound represented by formula (b1) and a photo base generator:
in which R
b1
to R
b3
each independently represents a hydrogen atom, halogen atom, hydroxyl group, mercapto group, sulfide group, silyl group, silanol group, nitro group, nitroso group, sulfonato group, phosphino group, phosphinyl group, phosphonato group or organic group; R
b4
and R
b5
each independently represent a hydrogen atom, halogen atom, hydroxyl group, mercapto group, sulfide group, silyl group, silanol group, nitro group, nitroso group, sulfino group, sulfo group, sulfonato group, phosphino group, phosphinyl group, phosphono group, phosphonato group or aliphatic group; and R
b6
represents a hydrogen atom, alkyl group or alkoxy group.
一种能量敏感的组合物,包括聚硅烷、碱发生剂和溶剂,其中碱发生剂包括由公式(b1)表示的化合物和光碱发生剂:其中Rb1至Rb3各自独立地表示氢原子、卤素原子、羟基、巯基、硫化物基、硅基、硅醇基、硝基、亚硝基、磺酸盐基、膦基、膦基酰基、膦酸盐基或有机基团;Rb4和Rb5各自独立地表示氢原子、卤素原子、羟基、巯基、硫化物基、硅基、硅醇基、硝基、亚硝基、磺酸内酯基、磺酸基、磺酸盐基、膦基、膦基酰基、膦酸盐基或脂肪基团;而Rb6表示氢原子、烷基或烷氧基。