申请人:TORAY INDUSTRIES, INC.
公开号:EP0137655A2
公开(公告)日:1985-04-17
A radiation-sensitive composition is described, which is comprised of (1) a polymer containing repeating units of the formula:
wherein R' is a trivalent or tetravalent aromatic or heteroaromatic residue having 6 to 30 carbon atoms, R2 is a divalent aromatic or heteroaromatic residue having 6 to 30 carbon atoms, R3 is hydrogen or an ammonium ion, n is 1 or 2, and COOR3 is located in an ortho or peri position with respect to the amide linkage, (2) an organic compound having a radiation-dimerizable or radiation-polymerizable olefinic double bond and an amino radical or a quaternary ammonium salt, and (3) an aromatic monoazide compound with 6 to 30 carbon atoms having no substituent or having a neutral or acidic substituent. This composition has a highly improved radiation sensitivity and the sensitive wavelength region of this composition is very broad. This composition can give a highly heat-resistant relief pattern with a good edge sharpness. Heat-resistant relief patterns obtained from this composition are especially useful as insulating passivation or protective coatings in semiconductor devices.
描述了一种辐射敏感组合物,该组合物由 (1) 含有式中重复单元的聚合物组成:
其中 R' 是具有 6 至 30 个碳原子的三价或四价芳香族或杂芳香族残基,R2 是具有 6 至 30 个碳原子的二价芳香族或杂芳香族残基,R3 是氢或铵离子,n 是 1 或 2,COOR3 相对于酰胺连接位于正位或周位处、(2) 具有可辐射二聚体或可辐射聚合的烯烃双键和氨基或季铵盐的有机化合物;以及 (3) 具有 6 至 30 个碳原子、不含取代基或具有中性或酸性取代基的芳香族单叠氮化物。这种组合物对辐射的敏感性有很大提高,其敏感波长区域非常宽。这种组合物可以产生边缘锐利的高耐热浮雕图案。用这种组合物制成的耐热浮雕图案特别适用于半导体器件中的绝缘钝化或保护涂层。