Cleaning agent for semiconductor device and cleaning method using the same
申请人:FUJIFILM Corporation
公开号:EP2045318A1
公开(公告)日:2009-04-08
The present invention provides a cleaning agent for cleaning a semiconductor device having copper wiring on the surface thereof following a chemical mechanical polishing process in a production process of a semiconductor device, including a compound represented by the following formula (I):
X1-L-X2 formula (I)
wherein, in formula (I), X1 and X2 each independently represent a monovalent substituent formed by removing one hydrogen atom from a heterocycle containing at least one nitrogen atom, and L represents a divalent linking group; and provides a cleaning method using the cleaning agent.
IVANOV N. A.; VLASOVA R. V.; GONCHAROVA V. A.; SMIRNOV L. N., IZV. VYSSH. UCHEB. ZAVEDENIJ. XIMIYA I XIM. TEXNOL. <IVUK-AR>, 1976, 19, +
作者:IVANOV N. A.、 VLASOVA R. V.、 GONCHAROVA V. A.、 SMIRNOV L. N.
DOI:——
日期:——
CLEANING AGENT FOR SEMICONDUCTOR DEVICE AND CLEANING METHOD USING THE SAME
申请人:NISHIWAKI Yoshinori
公开号:US20090088361A1
公开(公告)日:2009-04-02
The present invention provides a cleaning agent for cleaning a semiconductor device having copper wiring on the surface thereof following a chemical mechanical polishing process in a production process of a semiconductor device, including a compound represented by the following formula (I):
X
1
-L—X
2
formula (I)
wherein, in formula (I), X
1
and X
2
each independently represent a monovalent substituent formed by removing one hydrogen atom from a heterocycle containing at least one nitrogen atom, and L represents a divalent linking group; and provides a cleaning method using the cleaning agent.
POLISHING LIQUID FOR METAL AND POLISHING METHOD USING THE SAME
申请人:TOMIGA Takamitsu
公开号:US20090239380A1
公开(公告)日:2009-09-24
A liquid for polishing a metal is provided that is used for chemically and mechanically polishing a conductor film including copper or a copper alloy in production of a semiconductor device, and a polishing method using the metal-polishing liquid is also provided. The liquid includes: (a) colloidal silica particles having an average primary particle size of from 10 nm to 25 nm and an average secondary particle size of from 50 nm to 70 nm; (b) a metal anticorrosive agent; (c) at least one compound selected from the group consisting of a surfactant and a water-soluble polymer compound; (d) an oxidizing agent; and (e) an organic acid.
Metal polishing slurry and chemical mechanical polishing method
申请人:Yoshikawa Masaru
公开号:US20100075500A1
公开(公告)日:2010-03-25
The invention provides a metal polishing slurry containing a compound represented by the general formula (1): (X
1
)
n
-L wherein X
1
represents a heterocycle containing at least one nitrogen atom, n represents an integer of 2 or more, and L represents a linking group having a valence of 2 or more, provided that X
1
s whose number is n may be the same or different, an oxidizer and an organic acid; and a method of chemical mechanical polishing using such slurry. The metal polishing slurry and the chemical mechanical polishing method are used in chemical mechanical polishing in the step of manufacturing semiconductor devices and enable a high polishing rate to be achieved while causing minimal dishing in polishing an object (wafer).