Hexafluoroalcohol-based Monomers and Processes of Preparation Thereof
申请人:Motallebi Shahrokh
公开号:US20090143611A1
公开(公告)日:2009-06-04
The present invention relates to compounds of formula (I): wherein R
1
is H, or a C
1
-C
10
linear, branched or cyclic alkyl group which is unsubstituted or substituted with fluorine; R
2
is an alicyclic group having 5 to 20 carbon atoms which is unsubstituted or substituted with fluorine; and R
3
represents a C
1
-C
10
linear or branched alkylene which is unsubstituted or substituted with fluorine. Processes for preparing such compounds are also disclosed. The compounds of the present invention can be used as monomers in the fields of photolithography and semiconductor fabrication.