[EN] PATTERN FORMING METHOD, COMPOUND USED THEREIN, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND ELECTRONIC DEVICE<br/>[FR] PROCÉDÉ DE FORMATION DE MOTIFS, COMPOSÉ UTILISÉ DANS CE PROCÉDÉ, COMPOSITION DE RÉSINE SENSIBLE AUX RAYONS ACTINIQUES OU SENSIBLE AU RAYONNEMENT, FILM DE RÉSERVE, PROCÉDÉ DE FABRICATION D'UN DISPOSITIF ÉLECTRONIQUE, ET DISPOSITIF ÉLECTRONIQUE
申请人:FUJIFILM CORP
公开号:WO2014119698A1
公开(公告)日:2014-08-07
There is provided an actinic ray-sensitive or radiation-sensitive resin composition comprising: (A) a resin having a group capable of decomposing by an action of an acid to produce a polar group, (C1) a compound containing a group capable of generating a first acidic functional group upon irradiation with an actinic ray or radiation and a group capable of generating a second acidic functional group different from the first acidic functional group upon irradiation with an actinic ray or radiation, and (C2) at least one compound containing two or more groups selected from the group consisting of the groups capable of generating the structures represented by the specific formulae upon irradiation with an actinic ray or radiation.
[EN] ACTIVE LIGHT-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTIVE LIGHT-SENSITIVE OR RADIATION-SENSITIVE RESIN FILM, PATTERN-FORMING METHOD, AND ELECTRONIC DEVICE PRODUCTION METHOD<br/>[FR] COMPOSITION DE RÉSINE SENSIBLE À LA LUMIÈRE ACTIVE OU AU RAYONNEMENT, FILM DE RÉSINE SENSIBLE À LA LUMIÈRE ACTIVE OU AU RAYONNEMENT, PROCÉDÉ DE FORMATION DE MOTIF, ET PROCÉDÉ DE PRODUCTION DE DISPOSITIF ÉLECTRONIQUE<br/>[JA] 感活性光線性又は感放射線性樹脂組成物、感活性光線性又は感放射線性膜、パターン形成方法、及び電子デバイスの製造方法
申请人:FUJIFILM CORP
公开号:WO2020202944A1
公开(公告)日:2020-10-08
厚膜の感活性光線性感放射線性膜から断面形状のアスペクト比が非常に高いパターンを形成する場合において、断面形状の矩形性に非常に優れたパターンを形成可能な感活性光線性又は感放射線性樹脂組成物等を提供する。感活性光線性又は感放射線性樹脂組成物は、(A)酸の作用により極性が増大する樹脂、(B)活性光線又は放射線の照射により酸を発生する化合物、及び、(C)特定の構造で表される分子量が220以上の化合物を含む。