申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20210181633A1
公开(公告)日:2021-06-17
A resist composition that generates an acid upon exposure and has solubility in a developing solution, which is changed by action of an acid, the resist composition containing a resin component having a constitutional unit represented by General Formula (a01-1) and a constitutional unit represented by General Formula (a02-1). In General Formula (a01-1), R represents a hydrogen atom, an alkyl group, or a halogenated alkyl group; Yax
01
represents a linking group; Ax represents a sulfonyl group or a sulfoxide group; Rax
01
represents an alkyl group, an alkoxy group, a halogen atom, or a halogenated alkyl group; s0 and v0 represent an integer of 0 to 6; and 1≤s0+v0≤6 and u0≤s0+v0. In General Formula (a02-1), Ra
00
represents an acid-dissociable group represented by General Formula (a02-r2-1)