[EN] PHOTORESIST REMOVER COMPOSITIONS<br/>[FR] COMPOSITIONS D'ÉLIMINATION DE PHOTORÉSINE
申请人:MERCK PATENT GMBH
公开号:WO2019158234A1
公开(公告)日:2019-08-22
The present invention relates to a remover composition comprising, tetraalkylammonium hydroxide, a benzylic alcohol, a glycol component comprising at least one glycol compound, and a and an alkyl amine component, wherein said alkyl amine component is selected from the group consisting of a dialkyl amine, a mono-alkyl amine having structure having structure (I), and combinations thereof wherein, in said dialkyl amine, one of the alkyl groups is a C-1 to C-4 n-alkyl and the other alkyl group is a C-16 to C-20 n-alkyl, and for said mono-alkyl amine m' and m are independently chosen from an integer ranging from 4 to 8. This invention also pertains to the process of using these compositions to remove a patterned photoresist from a substrate.