对甲酚 、 间甲酚 、 聚合甲醛 以after-treatments to obtain 38.4 g of p-cresol/m-cresol/formaldehyde polycondensate as slightly white waxy crystals的产率得到p-Cresol m-cresol formaldehyde
A polymer of polyhydroxystyrene derivative containing an acetal or ketal group which can easily be eliminated in the presence of an acid in the molecule and having a very narrow molecular weight distribution gives a resist material suitable for forming ultrafine patterns excellent in resolution, heat resistance, mask linearity, and other properties without causing problems of delay time and the like.
LOW METAL ION CONTAINING 4,4'-(1-(4-(1-(4-HYDROXYPHENYL)-1-METHYLETHYL)PHENYL)ETHYLIDENE)BISPHENOL AND PHOTORESIST COMPOSITIONS THEREFROM
申请人:CLARIANT INTERNATIONAL LTD.
公开号:EP0854850A1
公开(公告)日:1998-07-29
[EN] LOW METAL ION CONTAINING 4,4'-(1-(4-(1-(4-HYDROXYPHENYL)-1-METHYLETHYL)PHENYL)ETHYLIDENE)BISPHENOL AND PHOTORESIST COMPOSITIONS THEREFROM<br/>[FR] 4,4'-(1-(4-(1-(4-HYDROXYPHENYL)-1-METHYLETHYL)PHENYL)ETHYLDIENE)BISPHENOL (TPPA) A FAIBLE NIVEAU D'IONS METALLIQUES ET COMPOSITIONS DERIVEES POUR PHOTORESIST
申请人:CLARIANT INTERNATIONAL, LTD.
公开号:WO1997011929A1
公开(公告)日:1997-04-03
(EN) The present invention provides methods for producing TPPA having low level of metal ions, utilizing treated ion exchange resins. A method is also provided for producing photoresist composition having a very low level of metal ions from such TPPA for producing semiconductor devices using such photoresist compositions.(FR) La présente invention concerne un procédé de production de composé TPPA à faible niveau d'ions métalliques, qui utilise des résines échangeuses d'ions traitées. L'invention concerne également un procédé de production d'une composition pour photorésist, qui présente un faible niveau d'ions métaux issus d'un tel composé TPPA et convient à la production de semi-conducteurs à l'aide de ces compositions pour photorésist.
Polymer composition and resist material
申请人:Wako Pure Chemical Industries, Ltd.
公开号:US05976759A1
公开(公告)日:1999-11-02
A polymer composition comprising (i) a polymer (a) having a monomer unit containing a functional group A which becomes alkali-soluble by heating in the presence of an acid, (ii) a polymer (b) having a monomer unit containing a functional group B which also becomes alkali-soluble, but less easily than the functional group A, by heating in the presence of an acid, and if necessary in addition to (i) and (ii) or in place of (ii), (iii) a phenolic compound having a weight-average molecular weight of 300 to 15,000 gives together with an photoacid generator a resist material suitable for forming a pattern excellent in sensitivity, resolution, mask linearity and other properties.