A polymer of polyhydroxystyrene derivative containing an acetal or ketal group which can easily be eliminated in the presence of an acid in the molecule and having a very narrow molecular weight distribution gives a resist material suitable for forming ultrafine patterns excellent in resolution, heat resistance, mask linearity, and other properties without causing problems of delay time and the like.
一种聚羟基
苯乙烯衍
生物的聚合物,其中含有一个醛缩或环缩基团,在分子中易于在酸的存在下消除,并具有非常窄的分子量分布,可提供适用于形成超细图案的抗蚀材料,具有出色的分辨率、耐热性、掩模线性和其他性能,而不会引起延迟时间等问题。