3,3-Difluoro-2-(trifluoromethyl)bicyclo[2.2.1]hept-5-en-2-ol | 370102-71-9

• 分子结构分类: 有机化合物 - 有机氧化合物
• 英文名称: 3,3-Difluoro-2-(trifluoromethyl)bicyclo[2.2.1]hept-5-en-2-ol
• CAS: 370102-71-9
• 化学式: C₈H₇F₅O
• 分子量: 214.13
• InChiKey: JLBMCECANBMNQK-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  2.1
• 重原子数：
  14
• 可旋转键数：
  0
• 环数：
  2.0
• sp3杂化的碳原子比例：
  0.75
• 拓扑面积：
  20.2
• 氢给体数：
  1
• 氢受体数：
  6

文献信息

• PHOTOSENSITIVE SILSESQUIOXANE RESIN
  申请人：DOW CORNING CORPORATION

  公开号：EP1660561A2

  公开（公告）日：2006-05-31
• JP2009543135A
  申请人：——

  公开号：JP2009543135A

  公开（公告）日：2009-12-03
• Silsesquioxane Resin
  申请人：Hu Sanlin

  公开号：US20070281242A1

  公开（公告）日：2007-12-06

  This invention pertains to a silsesquioxane resin with improved lithographic properties (such as etch-resistance, transparency, resolution, sensitivity, focus latitude, line edge roughness, and adhesion) suitable as a photoresist; a method for incorporating the fluorinated or non-fluorinated functional groups onto silsesquioxane backbone. The silsesquioxane resins of this invention has the general structure (HSiO 3/2 ) a (RSiO 3/2 ) b wherein; R is an acid dissociable group, a has a value of 0.2 to 0.9 and b has a value of 0.1 to 0.8 and 0.9≦a+b≦1.0.
• SILSESQUIOXANE RESIN SYSTEMS WITH BASE ADDITIVES BEARING ELECTRON-ATTRACTING FUNCTIONALITIES
  申请人：Hu Sanlin

  公开号：US20090202941A1

  公开（公告）日：2009-08-13

  Silsesquioxane-based compositions that contain (a) silsesquioxane resins that contain HSiO3/2 units and RSiO 3/2 units wherein; R is an acid dissociable group, and (b) least one organic base additive selected from bulky tertiary amines, imides, amides and the polymeric amines wherein the organic base additive contains an electron-attracting group with the provision that the organic base additive is not 7-diethylamino-4-methylcoumarin. The silsesquioxane-based compositions are useful as positive resist compositions in forming patterned features on substrate, particularly useful for multi-layer layer (i.e. bilayer) 193 nm & 157 nm photolithographic applications.
• US7511179B2
  申请人：——

  公开号：US7511179B2

  公开（公告）日：2009-03-31