Lactone compounds of formula (1) are novel and useful as monomers to form base resins for use in chemically amplified resist compositions adapted for micropatterning lithography.
1
Letter k is 0 or 1 and m is an integer of 1-8.
                            公式(1)的内酯化合物是一种新颖且有用的单体,可用于形成基础
树脂,用于
化学放大的抗蚀剂组合物,适用于微细图案化的光刻。其中,字母k为0或1,m为1-8的整数。