ACID-LABILE ESTER MONOMER HAVING SPIROCYCLIC STRUCTURE, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Kinsho Takeshi
公开号:US20100304295A1
公开(公告)日:2010-12-02
An acid-labile ester monomer of spirocyclic structure has formula (1) wherein Z is a monovalent group having a polymerizable double bond, X is a divalent group which forms a cyclopentane, cyclohexane or norbornane ring, R
2
is H or monovalent hydrocarbon, R
3
and R
4
are H or monovalent hydrocarbon, or R
3
and R
4
, taken together, stand for a divalent group which forms a cyclopentane or cyclohexane ring, and n is 1 or 2. A polymer obtained from the acid-labile ester monomer has so high reactivity in acid-catalyzed elimination reaction that the polymer may be used to formulate a resist composition having high resolution.
Thiosilane and a catalytic amount of a Bronsted acid mediate the novel domino-type rearrangement reaction of the 4,4-disubstituted cyclohexadienones to produce the 3,4-disubstituted benzenethioethers; the key step is 1,2-addition of thiosilane to dienone.
Oxygen atom transfer from iodylbenzene to diphenyl diselenide - a convenient method for dehydrogenation of steroidal 3-ketones
作者:Derek H. R. Barton、Jacek W. Morzycki、William B. Motherwell、Steven V. Ley
DOI:10.1039/c39810001044
日期:——
Steroidal3-ketones are smoothly dehydrogenated in high yield using benzeneseleninic anhydride generated in situ by oxygenatomtransferfromiodylbenzene, PhIO2, to catalytic amounts of diphenyldiselenide; use of meta-iodylbenzoic acid in the above cycle has led to the development of an economical and experimentally convenientmethod avoiding chromatographic separations and with recovery of the m-iodobenzoic