The present invention relates to a resist resin having an acid-decomposable group, which gives rise to decomposition of the acid-decomposable group to show an increased solubility to an aqueous alkali solution by the action of an acid, wherein the resist resin has, in the main chain, an alicyclic lactone structure represented by the following general formula (1). According to the present invention, a positive-type chemically amplified resist can be obtained which has high transparency to a far-ultraviolet light having a wavelength of about 220 nm or less, excellent etching resistance, and excellent adhesion to substrate; and a fine pattern required in production of semiconductor device can be formed.
1
(wherein Z is an alicyclic hydrocarbon group having a lactone structure).
本发明涉及一种具有可酸化基团的光刻胶
树脂,在酸的作用下,可酸化基团分解,对碱
水溶液的溶解度增加,其中光刻胶
树脂的主链具有如下通式(1)表示的脂环内酯结构。根据本发明,可以获得一种正型
化学放大抗蚀剂,该抗蚀剂对波长约为 220 nm 或以下的远紫外光具有高透明度、优异的抗蚀刻性以及与基底的优异粘附性,并且可以形成生产半导体器件所需的精细图案。
1
(其中 Z 是具有内酯结构的脂
环烃基团)。