A topcoat composition to be applied on a resist film is provided, the topcoat composition including: (A) an alkali-soluble resin; (B) a compound containing at least one of an Si atom and an F atom, and increasing a contact angle on a surface of the topcoat film; and (C) a solvent.
提供一种用于应用于抗蚀膜的面涂层组合物,该面涂层组合物包括:(A)一种碱溶性
树脂;(B)一种含有至少一个Si原子和一个F原子的化合物,并增加面涂层膜表面的接触角;和(C)一种溶剂。