申请人:Wittenbecher Lars
公开号:US20070197810A1
公开(公告)日:2007-08-23
Copper(I) formate complexes of the formula L
n
Cu(HCOO).x HCOOH, where x is from 0 to 10, n is 1, 2, 3 or 4 and the n ligands L, independently of one another, are each one of the following ligands:
a phosphane of the formula R
1
R
2
R
3
P;
a phosphite of the formula (R
1
O)(R
2
O)(R
3
O)P;
an isocyanide of the formula R
1
—NC;
an alkene of the formula R
1
R
2
C═CR
3
R
4
; or
an alkyne of the formula R
1
C≡CR
2
;
where R
1
, R
2
, R
3
and R
4
, independently of one another, are hydrogen, a linear or branched, optionally partly or completely fluorinated alkyl, aminoalkyl, alkoxyalkyl, hydroxyalkyl, phosphinoalkyl or aryl radical of one to 20 carbon atoms;
with the exception of triphenylphosphinocopper(I) formate and 1,1,1-tris(diphenyl-phosphinomethyl)ethanecopper(I) formate; are decomposed for depositing metallic copper.
铜(I)甲酸盐配合物的化学式为LnCu(HCOO)。x HCOOH,其中x取值范围为0至10,n为1、2、3或4,而n配体L独立地可以是以下任一种配体:磷化物的化学式为R1R2R3P;亚磷酸酯的化学式为(R1O)(R2O)(R3O)P;异氰化物的化学式为R1—NC;烯烃的化学式为R1R2C═CR3R4;或炔烃的化学式为R1C≡CR2;其中R1、R2、R3和R4独立地可以是氢、直链或支链的、部分或完全氟化的烷基、氨基烷基、烷氧基烷基、羟基烷基、膦烷基或芳基,碳原子数为1至20;除了三苯基膦铜(I)甲酸盐和1,1,1-三(二苯基膦甲基)乙烷铜(I)甲酸盐之外,这些配合物可分解以沉积金属铜。