申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20160130210A1
公开(公告)日:2016-05-12
A compound represented by formula (I), a resin including a structural unit derived from the compound and a resist composition including the resin:
wherein R
1
represents a hydrogen atom, a halogen atom or a C
1
to C
6
alkyl group in which a hydrogen atom may be replaced by a halogen atom, R
2
represents a C
1
to C
6
perfluoroalkyl group or *—CHR
f1
R
f2
, * represents a binding site to a carbonyl group, R
f1
and R
f2
each independently represent a C
1
to C
4
perfluoroalkyl group or R
f1
and R
f2
may be bonded together with a carbon atom bonded thereto to form a ring, A
1
represents a single bond, a C
1
to C
6
alkanediyl group or **-A
3
-X
1
-(A
4
-X
2
)
a
-(A
5
)
b
-, ** represents a binding site to an oxygen atom, A
2
, A
3
, A
4
and A
5
each independently represent a C
1
to C
6
alkanediyl group, X
1
and X
2
each independently represent —O—, —CO—O— or —O—CO—, a and b each represent 0 or 1, and W
1
represents a C
5
to C
18
divalent alicyclic hydrocarbon group.
化合物的化学式为(I),包括从该化合物衍生的结构单元的树脂和包括该树脂的抗蚀组合物:
其中R
1
代表氢原子、卤素原子或C
1
到C
6
烷基基团,其中氢原子可以被卤素原子取代,R
2
代表C
1
到C
6
全氟烷基基团或*—CHR
f1
R
f2
,*代表与羰基结合位点,R
f1
和R
f2
各自独立代表C
1
到C
4
全氟烷基基团或R
f1
和R
f2
可以与结合在一起的碳原子形成环,A
1
代表单键,C
1
到C
6
烷二基基团或**-A
3
-X
1
-(A
4
-X
2
)
a
-(A
5
)
b
-,**代表与氧原子结合位点,A
2
、A
3
、A
4
和A
5
各自独立代表C
1
到C
6
烷二基基团,X
1
和X
2
各自独立代表—O—、—CO—O—或—O—CO—,a和b各自代表0或1,W
1
代表C
5
到C
18
的二价脂环烃基团。