申请人:Ishihara Masami
公开号:US20050020710A1
公开(公告)日:2005-01-27
The present invention relates to a hybrid type onium salt having an iodonium salt and a sulfonium salt in the molecule, useful, for example, as a cationic type photopolymerization initiator and an acid generator for a chemically amplified resist and provides a hybrid type onium salt shown by the general formula [1]:
[wherein R
1
to R
3
are each independently a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group or an amino group which maybe substituted; Q
1
is a direct-linkage, an oxygen atom, a sulfur atom or a lower alkylene chain; T
1
is an alkylene group or an arylene group, which may have a substituent selected from the group consisting of a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amino group which may be substituted; and R
4
is an alkyl group, an alkenyl group, an aryl group or an aralkyl group, which may have a substituent selected from the group consisting of a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amino group which may be substituted or a group shown by the general formula [2]:
(wherein R
5
to R
7
are each independently a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group or an amino group which maybe substituted; Q
2
is a direct-linkage, an oxygen atom, a sulfur atom or a lower alkylene chain; T
2
an alkylene group or an arylene group, which may have a substituent selected from the group consisting of a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amino group which may be substituted; A
3
is a counter anion; m is an integer of 0 to 4; and two ns are each independently an integer of 0 to 5); A
1
and A
2
are each independently a counter anion; and m and n are the same as described above], and a polymerization initiator or an acid generator, comprising said onium salt.
本发明涉及一种杂化型离子盐,其分子中具有碘化离子盐和亚砜盐,例如,作为阳离子型光聚合引发剂和化学放大型抗蚀剂的酸发生剂有用,并提供由通式[1]所示的杂化型离子盐:[其中R1至R3分别独立地是卤素原子、烷基、卤代烷基、芳基、烷氧基、芳氧基、烷硫基、芳硫基或氨基,可被取代;Q1是直链、氧原子、硫原子或较低的烷基链;T1是烷基或芳基,可具有从卤素原子、烷基、卤代烷基、芳基、烷氧基、芳氧基、烷硫基、芳硫基和可被取代的氨基中选择的取代基;R4是烷基、烯丙基、芳基或芳基烷基,可具有从卤素原子、烷基、卤代烷基、芳基、烷氧基、芳氧基、烷硫基、芳硫基和可被取代的氨基中选择的取代基或由通式[2]所示的基:(其中R5至R7分别独立地是卤素原子、烷基、卤代烷基、芳基、烷氧基、芳氧基、烷硫基、芳硫基或氨基,可被取代;Q2是直链、氧原子、硫原子或较低的烷基链;T2是烷基或芳基,可具有从卤素原子、烷基、卤代烷基、芳基、烷氧基、芳氧基、烷硫基、芳硫基和可被取代的氨基中选择的取代基;A3是一个对离子;m是0到4的整数;两个n各自独立地是0到5的整数);A1和A2各自独立地是一个对离子;m和n与上述描述相同],以及包含该离子盐的聚合引发剂或酸发生剂。