ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM USING THE SAME, PATTERN FORMING METHOD, MANUFACTURING METHOD OF ELECTRONIC DEVICE, ELECTRONIC DEVICE AND RESIN
申请人:FUJIFILM Corporation
公开号:US20150132688A1
公开(公告)日:2015-05-14
There is provided an actinic ray-sensitive or radiation-sensitive resin composition comprising (P) a resin having (a) a repeating unit represented by the specific formula; a resist film formed using the actinic ray-sensitive or radiation-sensitive resin composition; a pattern forming method comprising (i) a step of forming a film by using the actinic ray-sensitive or radiation-sensitive resin composition, (ii) a step of exposing the film, and (iii) a step of developing the exposed film by using a developer to form a pattern; a method for manufacturing an electronic device, comprising the pattern forming method; and an electronic device manufactured by the manufacturing method of an electronic device.
提供了一种光致射线敏感或辐射敏感的树脂组合物,其中包括(P)具有(a)由特定公式表示的重复单元的树脂;使用该光致射线敏感或辐射敏感的树脂组合物形成的抗蚀膜;包括(i)使用该光致射线敏感或辐射敏感的树脂组合物形成膜的步骤,(ii)曝光膜的步骤,以及(iii)使用显影剂显影曝光的膜以形成图案的图案形成方法;一种制造电子设备的方法,包括图案形成方法;以及通过电子设备的制造方法制造的电子设备。