[DE] DICARBONSÄUREN FÜR DIELEKTRIKA MIT SPERRWIRKUNG GEGEN KUPFERDIFFUSION [EN] DICARBOXYLIC ACIDS FOR DIELECTRICS WITH BARRIER EFFECT AGAINST COPPER DIFFUSION [FR] ACIDES DICARBOXYLIQUES DESTINES A DES DIELECTRIQUES PRESENTANT UNE FONCTION DE BARRIERE CONTRE LA DIFFUSION DU CUIVRE
Dicarboxylic acids for dielectrics having barrier effect against copper diffusion
申请人:Walter Andreas
公开号:US20050203269A1
公开(公告)日:2005-09-15
Novel dicarboxylic acids are described herein that are suitable for the preparation of high-temperature-stable polymers, which are particularly useful in forming suitable dielectrics in microelectronics.