Photoacid generators generate sulfonic acids of formula (1a) or (1b) upon exposure to high-energy radiation.
R
1
—COOCH
2
CF
2
SO
3
−
H
+
(1a)
R
1
—O—COOCH
2
CF
2
SO
3
−
H
+
(1b)
R
1
is a monovalent C
20
-C
50
hydrocarbon group of steroid structure which may contain a heteroatom. The bulky steroid structure ensures adequate control of acid diffusion. The photoacid generators are compatible with resins and suited for use in chemically amplified resist compositions.
光酸发生剂在高能辐射作用下生成式(1a)或(1b)的
磺酸。R1—COOCH2
CF2SO3−H+(1a)R1—O—COOCH2
CF2SO3−H+(1b)R1是一种单价的C20-C50类
固醇结构的烃基,可能含有杂原子。庞大的类
固醇结构确保了对酸扩散的充分控制。光酸发生剂与
树脂相容,并适用于
化学增感抗蚀组合物的使用。