A radiation-sensitive resin composition comprising (A) an alkali-soluble resin having an unsaturated group, (B) a compound having at least one ethylenically unsaturated double bond, and (C) a radiation-induced radical polymerization initiator, wherein:
the alkali-soluble resin having an unsaturated group (A) is obtained by reacting:
100 parts by weight of a copolymer comprising
1 to 40 wt % structural units derived from (a) a radically polymerizable compound having a carboxyl group;
1 to 50 wt % structural units having a phenolic hydroxyl group which are derived from (b-1) a radically polymerizable compound having a phenolic hydroxyl group or (b-2) a radically polymerizable compound having a functional group convertible into a phenolic hydroxyl group after the copolymerization,
other structural units of said copolymer being derived from (c) another radically polymerizable compound;
with 0.1 to 20 parts by weight of (d) a radically polymerizable compound having an epoxy group.
The resin composition can form a radiation-sensitive film in a thickness greater than a deposit thickness and has a high resolution.
一种辐射敏感的
树脂组合物,包括(A)具有不饱和基团的碱溶性
树脂,(B)至少具有一个
乙烯基不饱和双键的化合物,和(C)辐射诱导的自由基聚合
引发剂,其中:具有不饱和基团的碱溶性
树脂(A)是通过反应得到的:100重量份的共聚物,包括1至40重量%的由(a)具有羧基的自由基聚合化合物衍生的结构单元,1至50重量%的具有
酚羟基的结构单元,该结构单元来源于(b-1)具有
酚羟基的自由基聚合化合物或(b-2)在共聚之后可以转化为
酚羟基的功能性基团的自由基聚合化合物,该共聚物的其他结构单元来源于(c)另一种自由基聚合化合物;以及0.1至20重量份的具有环氧基团的自由基聚合化合物(d)。该
树脂组合物可以形成具有高分辨率的辐射敏感薄膜,其厚度大于沉积厚度。