申请人:FUJI PHOTO FILM CO., LTD.
公开号:EP0445680A2
公开(公告)日:1991-09-11
A positive type photoresist composition which is superior in the prevention of pattern break and scumming during development, comprising an alkali-soluble novolak resin and a 1,2-quinonediazide compound, wherein said novolak resin is a condensate of a mixture of m-cresol and p-cresol with at least one of formaldehyde, formaldehyde polymer and formaldehyde precursor and wherein the relationship between X = A/(A+B+C) and the content of m-cresol in said novolak resin falls within the shaded part (including the straight lines surrounding this part) in Figure 1, said A representing an integrated value of peak area between 23.0 ppm and 31.0 ppm , B representing an integrated value of peak area between 31.0 ppm and 34.0 ppm and C representing an integrated value of peak area between 34.0 ppm and 37.0 ppm in a ¹³C-NMR spectrum of a dimethyl sulfoxide-d₆ solution of said novolak resin.
一种正型光刻胶组合物,在显影过程中可有效防止图案破裂和浮渣,该组合物由碱溶性酚醛树脂和 1,2-醌噻嗪化合物组成,其中所述酚醛树脂是间甲酚和对甲酚与甲醛、甲醛聚合物和甲醛前体中至少一种的混合物的缩合物、其中,X = A/(A+B+C) 与间甲酚在所述酚醛树脂中的含量之间的关系在图 1 中的阴影部分(包括围绕该部分的直线)内,所述 A 代表峰面积的综合值,介于 23.在所述酚醛树脂的二甲亚砜-d₆溶液的¹³C-NMR 光谱中,A 代表峰面积的综合值在 23.0 ppm 和 31.0 ppm 之间,B 代表峰面积的综合值在 31.0 ppm 和 34.0 ppm 之间,C 代表峰面积的综合值在 34.0 ppm 和 37.0 ppm 之间。