UV laser-induced photolysis of silacyclopent-3-ene: unseparable photochemistry of reactant and product for chemical vapour deposition of Si/C/H polymer
作者:Josef Pola、Akihiko Ouchi、Markéta Urbanová、Yoshinori Koga、Zdenĕk Bastl、Jan Šubrt
DOI:10.1016/s0022-328x(98)01001-8
日期:1999.3
UV laser-induced photolysis of silacyclopent-3-ene in the gas phase is a clean extrusion of silylene yielding buta-1,3-diene. Silylene self-polymerisation and consequent deposition of Si(n)H(2n) agglomerates is precluded by concurrently occurring photolysis of buta-1,3-diene. The solid polymeric deposit being produced through polymerisation steps involving both H(2)Si: and the products of the buta-1,3-diene photolysis makes the reaction suitable for chemical vapour deposition of Si/C/H films. (C) 1999 Elsevier Science S.A. All rights reserved.