申请人:Tokyo Ohka Kogyo Co., Ltd.
公开号:US07504196B2
公开(公告)日:2009-03-17
A positive resist composition that includes a base material component (A) that contains an acid-dissociable, dissolution-inhibiting group and exhibits increased alkali solubility under the action of acid, and an acid generator component (B) that generates acid upon exposure, wherein the base material component (A) contains a compound (A1), in which either a portion of, or all of, hydrogen atoms of phenolic hydroxyl groups within a polyhydric phenol compound, which has two or more phenolic hydroxyl groups, a molecular weight of 300 to 2,500, and is represented by a general formula (I) shown below, have been substituted with an acid-dissociable, dissolution-inhibiting group (II) represented by a general formula (II) shown below.
一种正性光刻胶组合物,包括基材料组分(A),其含有一个酸解离、抑制溶解基团,并在酸的作用下表现出增加的碱溶性,以及酸发生剂组分(B),其在曝光后生成酸,其中基材料组分(A)含有化合物(A1),该化合物中的苯酚羟基的氢原子的一部分或全部已被替换成一个酸解离、抑制溶解基团(II),该化合物是一种多羟基酚化合物,具有两个或更多苯酚羟基,分子量为300到2500,由下式(I)表示,所述酸解离、抑制溶解基团(II)由下式(II)表示。