申请人:Rohm and Haas Electronic Materials LLC
公开号:US10042259B2
公开(公告)日:2018-08-07
Topcoat compositions comprise: a matrix polymer; a surface active polymer comprising a polymerized unit formed from a monomer of the following general formula (I):
wherein: R1 represents H, F, methyl or fluorinated methyl; R2 represents optionally substituted C1 to C8 alkylene or optionally substituted C1 to C8 fluoroalkylene, optionally comprising one or more heteroatom; R3 represents H, F, optionally substituted C1 to C10 alkyl or optionally substituted C5 to C15 aryl, optionally comprising one or more heteroatom; R4 represents optionally substituted C1 to C8 alkyl, optionally substituted C1 to C8 fluoroalkyl or optionally substituted C5 to C15 aryl, optionally comprising one or more heteroatom; X represents O, S or NR5, wherein R5 is chosen from hydrogen and optionally substituted C1 to C5 alkyl; and a is 0 or 1; and a solvent. Also provided are coated substrates and pattern-forming methods which make use of the topcoat compositions. The invention has particular applicability in photolithographic processes as a photoresist topcoat layer in the manufacture of semiconductor devices.
面漆组合物包括:基质聚合物;表面活性聚合物,该聚合物由以下通式 (I) 的单体聚合而成:
其中R1 代表 H、F、甲基或氟化甲基; R2 代表任选取代的 C1 至 C8 亚烷基或任选取代的 C1 至 C8 氟亚烷基,任选包含一个或多个杂原子; R3 代表 H、F、任选取代的 C1 至 C10 烷基或任选取代的 C5 至 C15 芳基,任选包含一个或多个杂原子;R4 代表任选取代的 C1 至 C8 烷基、任选取代的 C1 至 C8 氟烷基或任选取代的 C5 至 C15 芳基,任选包含一个或多个杂原子;X 代表 O、S 或 NR5,其中 R5 选自氢和任选取代的 C1 至 C5 烷基;a 为 0 或 1;以及溶剂。本发明还提供了涂层基底和图案形成方法,这些基底和方法都使用了本发明的面漆组合物。本发明特别适用于光刻工艺,作为制造半导体器件的光刻胶面涂层。