RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, NOVEL COMPOUND, AND ACID GENERATOR
申请人:HADA Hideo
公开号:US20120264061A1
公开(公告)日:2012-10-18
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) including a compound represented by (b1-1), a compound represented by (b1-1′) and/or a compound represented by (b1-1″) (R
1
″-R
3
″ represents an aryl group or an alkyl group, provided that at least one of R
1
″-R
3
″ represents a substituted aryl group being substituted with a group represented by (b1-1-0), and two of R
1
″-R
3
″ may be mutually bonded to form a ring with the sulfur atom; X represents a C
3
-C
30
hydrocarbon group; Q
1
represents a carbonyl group-containing divalent linking group; X
10
represents a C
1
-C
30
hydrocarbon group; Q
3
represents a single bond or a divalent linking group; Y
10
represents —C(═O)— or —SO
2
—; Y
11
represents a C
1
-C
10
alkyl group or a fluorinated alkyl group: Q
2
represents a single bond or an alkylene group; and W represents a C
2
-C
10
alkylene group).
A compound represented by general formula (c1) (R
1
represents an alicyclic group of 5 or more carbon atoms which may have a substituent; X represents a divalent linking group; Y represents a linear, branched or cyclic alkylene group or an arylene group; Rf represents a hydrocarbon group containing a fluorine atom; and M
+
represents an organic cation or a metal cation).
Resist composition, method of forming resist pattern, novel compound, and acid generator
申请人:Kawaue Akiya
公开号:US20100136478A1
公开(公告)日:2010-06-03
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) including an acid generator (B1) containing a compound having a cation moiety represented by general formula (I) (in the formula, R
5
represents an organic group having a carbonyl group, an ester bond or a sulfonyl group; and Q represents a divalent linking group).
Compositions and Methods Incorporating Photocatalysts
申请人:Baker Ellen Schmidt
公开号:US20090285768A1
公开(公告)日:2009-11-19
The various embodiments provide a composition including an active material having functional groups capable of covalent attachment to a substrate in the presence of an acid or a base, a photocatalyst capable of generating an acid or a base upon exposure to light, and a vehicle. The compositions may also include surfactants, emulsifiers, oxidants, and other components. A method for treating a substrate is also disclosed. The method includes the steps of applying at least one active material having functional groups to the substrate, applying a photocatalyst to the substrate, and exposing the photocatalyst and the at least one active material to light for forming covalent attachments between the functional groups and constituent groups on the substrate. The compositions and methods described herein are useful in personal care product and consumer care product applications, for example.
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN AND POLYMERIC COMPOUND
申请人:Tokyo Ohka Kogyo Co., Ltd.
公开号:US20140221673A1
公开(公告)日:2014-08-07
A resist composition including a base component (A) which exhibits changed solubility in a developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the base component (A) containing a polymeric compound (A1) having a structural unit (a5) represented by general formula (a5-0) shown below (R
1
represents a sulfur atom or an oxygen atom; R
2
represents a single bond or a divalent linking group; and Y represents an aromatic hydrocarbon group or an aliphatic hydrocarbon group having a polycyclic group, provided that the aromatic hydrocarbon group or the aliphatic hydrocarbon may have a carbon atom or a hydrogen atom thereof substituted with a substituent.