BASIC COMPOUND, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Hatakeyama Jun
公开号:US20120141938A1
公开(公告)日:2012-06-07
A chemically amplified resist composition comprising a base polymer, an acid generator, and an amine quencher in the form of a β-alanine, γ-aminobutyric acid or 5-aminovaleric acid derivative having an acid labile group-substituted carboxyl group has a high contrast of alkaline dissolution rate before and after exposure and forms a pattern of good profile at a high resolution, minimal roughness and wide focus margin.
MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20140045123A1
公开(公告)日:2014-02-13
A polymer comprising recurring units derived from a (meth)acrylate monomer of tertiary ester type having branched alkyl on alicycle is used to form a resist composition. When subjected to exposure, PEB and organic solvent development, the resist composition is improved in dissolution contrast.
RESIST COMPOSITION, PATTERNING PROCESS, AND BARIUM, CESIUM AND CERIUM SALTS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20170115566A1
公开(公告)日:2017-04-27
A resist composition comprising a base resin comprising acid labile group-containing recurring units and preferably acid generator-containing recurring units, and a sodium, magnesium, potassium, calcium, rubidium, strontium, yttrium, cesium, barium or cerium salt of α-fluorinated sulfonic acid bonded to an alkyl, alkenyl, alkynyl or aryl group exhibits a high resolution and sensitivity and forms a pattern of satisfactory profile with minimal LWR after exposure and development.
dyotropic rearrangement of α‐methylene‐β‐lactones has been realized, which enables the efficient access of a wide range of α‐methylene‐γ‐butyrolactones displaying remarkable structural diversity. Several appealing features of the reaction, including excellent efficiency, high stereospecificity, predictable chemoselectivity and broad substrate scope, render it a powerful tool for the synthesis of MBL‐containing
A new synthetic route to β-bromoprop-2-ynyl mixed acetals and bromovinyl bis-allyl mixed acetals, precursors of α-methylene-γ-butyrolactones
作者:J. P. Dulcere、M. N. Mihoubi、J. Rodriguez
DOI:10.1039/c39880000237
日期:——
in methanol of β-bromoallenyl ethers (3a–g) or allyl allenyl ethers (8d–f) affords unsaturated halogeno-compounds (5a–g) or (9d–f) which are converted via homolytic carbocyclization into α-methylene-γ-butyrolactones (7a–g).