Sulfonamide compound, polymer compound, resist material and pattern formation method
申请人:Kishimura Shinji
公开号:US20070099117A1
公开(公告)日:2007-05-03
A base polymer of a resist material includes a unit represented by a general formula of the following Chemical Formula 3:
wherein R
1
, R
2
and R
3
are the same or different and are a hydrogen atom, a fluorine atom, a straight-chain alkyl group, a branched or cyclic alkyl group or a fluoridated alkyl group with a carbon number not less than 1 and not more than 20; R
4
is a straight-chain alkylene group or a branched or cyclic alkylene group with a carbon number not less than 0 and not more than 20; and R
5
and R
6
are the same or different and are a hydrogen atom, a straight-chain alkyl group, a branched or cyclic alkyl group, a fluoridated alkyl group with a carbon number not less than 1 and not more than 20, or a protecting group released by an acid.