Acid generator compounds are provided that are particularly useful as photoresist composition components. Preferred acid generators include cyclic sulfonium compounds that comprise a covalently linked acid-labile group.
ACID GENERATOR COMPOUNDS AND PHOTORESISTS COMPRISING SAME
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20160347709A1
公开(公告)日:2016-12-01
Acid generator compounds are provided that are particularly useful as a photoresist composition component. In one preferred aspect, acid generators are provided that comprise one or more hydrophilic moieties.
PHOTOBASE GENERATORS AND PHOTORESIST COMPOSITIONS COMPRISING SAME
申请人:Rohm and Haas Electronic Materials Korea Ltd.
公开号:US20160334703A1
公开(公告)日:2016-11-17
New photobase generators suitable for use in photoresists are provided that correspond to Formula (I):
X
1
—R
1
—O—C(═O)N(R
2
)R
3
(I)
wherein X
1
is an optionally substituted aromatic group; R
1
is a linker; and R
2
and R
3
are the same or different optionally substituted linear, branched or cyclic aliphatic group or an optionally substituted aromatic group, wherein at least one of R
2
and R
3
is an optionally substituted branched alkyl group having 4 or more carbon atoms.
COATING COMPOSITION FOR USE WITH AN OVERCOATED PHOTORESIST
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20170059991A1
公开(公告)日:2017-03-02
Organic coating compositions, particularly antireflective coating compositions for use with an overcoated photoresist, are provided that comprise that comprise a crosslinker component that comprises a structure of the following Formula (I):
Acid generators comprising a carbocyclic aryl or heteroaromatic group substituted with at least one acetate moiety are provided. These acid generators are particularly useful as a photoresist composition component.