Acid generator compounds are provided that are particularly useful as a photoresist composition component. In one preferred aspect, acid generators are provided that comprise one or more hydrophilic moieties.
提供了一些作为光刻胶组分特别有用的酸发生剂化合物。在一个首选方面,提供了包含一个或多个亲
水性基团的酸发生剂。