A compound shown by the following formula (1) can be used as a material for a radiation-sensitive composition capable of forming a resist film which effectively responds to electron beams or the like, exhibits low roughness, and can form a high precision minute pattern in a stable manner.
MUTULIS, F. K.;POLIS, YA. YU.;RAGUEL, B. P.;SEKATSIS, I. P.;MISHNEV, A. F+, ZH. ORGAN. XIMII, 25,(1989) N, S. 558-565
作者:MUTULIS, F. K.、POLIS, YA. YU.、RAGUEL, B. P.、SEKATSIS, I. P.、MISHNEV, A. F+
DOI:——
日期:——
ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD OF FORMING A PATTERN USING THE SAME
申请人:IIZUKA Yusuke
公开号:US20120171618A1
公开(公告)日:2012-07-05
According to one embodiment, an actinic-ray- or radiation-sensitive resin composition includes a resin containing a repeating unit (A) containing both a structural moiety (S1) that is decomposed by an action of an acid to thereby generate an alkali-soluble group and a structural moiety (S2) that is decomposed by an action of an alkali developer to thereby increase its rate of dissolution into the alkali developer, and a compound that generates an acid when exposed to actinic rays or radiation.