RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, ACID GENERATOR AND COMPOUND
申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20170176855A1
公开(公告)日:2017-06-22
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, and which includes a base component (A) which exhibits changed solubility in a developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) including a compound (B1) represented by general formula (b1) shown below (in general formula (b1), R
b1
represents a bridged alicyclic group having 7 to 30 carbon atoms and containing a polar group; Y
b1
represents a linear hydrocarbon group of 9 or more carbon atoms which may have a substituent excluding at least one member selected from the group consisting of an aromatic hydrocarbon group and a vinyl group; V
b1
represents a fluorinated alkylene group; m represents an integer of 1 or more; and M
m+
represents an organic cation having a valency of m).
R
b1
—Y
b1
—V
b1
—SO
3
−
(M
m+
)
1/m
(b1)
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, AND COMPOUND
申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20200174365A1
公开(公告)日:2020-06-04
A resist composition containing a base material component of which solubility in a developing solution is changed due to an action of an acid and a compound represented by Formula (bd1); in the formula, R
bd1
to R
bd3
each independently represent an aryl group which may have a substituent, provided that one or more of R
bd1
to R
bd3
are aryl groups having a fluorinated alkyl group which may have a substituent, and at least one of the fluorinated alkyl groups which may have a substituent in these aryl groups is bonded to a carbon atom adjacent to a carbon atom that is bonded to a sulfur atom in the formula, and a total number of the fluorinated alkyl groups which may have a substituent is 2 or more; X
−
represents a counter anion.
Resist composition, method of forming resist pattern, novel compound, and acid generator
申请人:Kawaue Akiya
公开号:US20100136478A1
公开(公告)日:2010-06-03
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) including an acid generator (B1) containing a compound having a cation moiety represented by general formula (I) (in the formula, R
5
represents an organic group having a carbonyl group, an ester bond or a sulfonyl group; and Q represents a divalent linking group).
Resist composition, method of forming resist pattern, novel compound and acid generator
申请人:Kawaue Akiya
公开号:US20100196820A1
公开(公告)日:2010-08-05
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) including an acid generator (B1) containing a compound having a cation moiety represented by general formula (I) (in the formula, R
5
represents a hydrogen atom or an organic group of 1 to 30 carbon atoms which may have a substituent; and Q
5
represents a single bond or a divalent linking group).
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, COMPOUND, AND ACID GENERATOR
申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20180149973A1
公开(公告)日:2018-05-31
A resist composition including a base component which exhibits changed solubility in a developing solution under action of acid, and a compound (B1) having an anion moiety and a cation moiety and being represented by general formula (b1) (wherein R
01
to R
014
each independently represents a hydrogen atom or a hydrocarbon group which may have a substituent, or two or more of R
01
to R
014
may be mutually bonded to form a ring structure, provided that at least two of R
01
to R
014
are mutually bonded to form a ring structure, and at least one of R
01
to R
014
has an anion group, and the anion moiety as a whole forms an anion having a valency of n; n represents an integer of 1 or more; represents an integer of 1 or more; and M
m+
represents an organic cation having a valency of m).