A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, and which includes a base component (A) which exhibits changed solubility in a developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) including a compound (B1) represented by general formula (b1) shown below (in general formula (b1), R
b1
represents a bridged alicyclic group having 7 to 30 carbon atoms and containing a polar group; Y
b1
represents a linear hydrocarbon group of 9 or more carbon atoms which may have a substituent excluding at least one member selected from the group consisting of an aromatic hydrocarbon group and a vinyl group; V
b1
represents a fluorinated alkylene group; m represents an integer of 1 or more; and M
m+
represents an organic cation having a valency of m).
R
b1
—Y
b1
—V
b1
—SO
3
−
(M
m+
)
1/m
(b1)
一种抗蚀组合物,在暴露后产生酸,并在酸的作用下在显影溶液中表现出改变的溶解度,包括在酸的作用下在显影溶液中表现出改变的溶解度的基组分(A)和在暴露后产生酸的酸生成组分(B),其中酸生成组分(B)包括下面所示的一般式(b1)表示的化合物(B1)(在一般式(b1)中,Rb1代表具有7至30个碳原子并含有极性基团的桥环脂环基团;Yb1代表具有9个或更多碳原子的线性烃基团,可能具有一个取代基,但不包括由
芳香烃基团和
乙烯基组成的至少一种成员;Vb1代表
氟代烷基烯基团;m表示1或更多的整数;Mm+代表价数为m的有机阳离子)。Rb1—Yb1—Vb1—SO3−(Mm+)1/m(b1)