The present invention relates to a method for modifying line edge roughness on a lithographically-produced feature in a material, the method comprising applying a block copolymer to an area on the feature having line edge roughness, the block copolymer comprising a charged hydrophilic polymer block and a non-charged hydrophilic polymer block.
申请人:SHELL INTERNATIONALE RESEARCH
MAATSCHAPPIJ B.V.
公开号:EP0129928A1
公开(公告)日:1985-01-02
Compounds of the formula:-
wherein Z is -COCO-, COS, COCHOH, or CH2XCH2; X is 0 or NR3; one of R1 and R2 is a substituted oxazolyl group and other is a defined hydrocarbyl group. The preparation of such compounds, their use as herbicides and herbicidal compositions containing them.