申请人:YOSHIDA Isao
公开号:US20130052588A1
公开(公告)日:2013-02-28
A photoresist composition containing a resin that is hardly soluble or insoluble, but which is soluble in an aqueous alkali solution by action of an acid, and a salt represented by formula (I):
wherein Q
1
, Q
2
, L
1
, W
1
, W
2
, R
1
, R
2
, t1 and t2 are defined in the specification, and Z
+
represents an organic cation.
一种光刻胶组合物,包含一种树脂,该树脂几乎不溶解或不溶解,但在酸的作用下可溶解于水性碱溶液中,并且包含由式(I)表示的盐:其中Q1、Q2、L1、W1、W2、R1、R2、t1和t2在规范中定义,Z+代表有机阳离子。