PHOTOSENSITIVE RESIN COMPOSITION, OXIME SULFONATE COMPOUND, METHOD FOR FORMING CURED FILM, CURED FILM, ORGANIC EL DISPLAY DEVICE, AND LIQUID CRYSTAL DISPLAY DEVICE
申请人:FUJIFILM Corporation
公开号:US20130171415A1
公开(公告)日:2013-07-04
Disclosed is a photosensitive resin composition comprising: (Component A) an oxime sulfonate compound represented by Formula (1); (Component B) a resin comprising a constituent unit having an acid-decomposable group that is decomposed by an acid to form a carboxyl group or a phenolic hydroxy group; and (Component C) a solvent
wherein in Formula (1) R
1
denotes an alkyl group, an aryl group, or a heteroaryl group, each R
2
independently denotes a hydrogen atom, an alkyl group, an aryl group, or a halogen atom, Ar
1
denotes an o-arylene group or an o-heteroarylene group, X denotes O or S, and n denotes 1 or 2, provided that of two or more R
2
s present in the compound, at least one denotes an alkyl group, an aryl group, or a halogen atom.
揭示了一种光敏树脂组合物,包括:(组分A)由式(1)表示的肟磺酸盐化合物;(组分B)包括具有可被酸分解的基团的树脂,该基团通过酸分解形成羧基或酚羟基;和(组分C)溶剂
其中在式(1)中,R1表示烷基、芳基或杂芳基,每个R2独立地表示氢原子、烷基、芳基或卤素原子,Ar1表示邻芳撑基或邻杂芳撑基,X表示O或S,n表示1或2,前提是在化合物中存在两个或两个以上的R2时,至少有一个表示烷基、芳基或卤素原子。