申请人:CHEN KUANG-JUNG
公开号:US20130040238A1
公开(公告)日:2013-02-14
A negative developable bottom antireflective coating (NDBARC) material includes a polymer containing an aliphatic alcohol moiety, an aromatic moiety, and a carboxylic acid moiety. The NDBARC composition is insoluble in a typical resist solvent such as propylene glycol methyl ether acetate (PGMEA) after coating and baking. The NDBARC material also includes a photoacid generator, and optionally a crosslinking compound. In the NDBARC material, the carboxylic acid provides the developer solubility, while the alcohol alone, the carboxylic acid alone, or their combination provides the PGMEA resistance. The NDBARC material has resistance to the resist solvent, and thus, intermixing does not occur between NDBARC and resist during resist coating over NDBARC. After exposure and bake, the lithographically exposed portions of both the negative photoresist and the NDBARC layer become insoluble in developer due to the chemically amplified crosslinking of the polymers in negative resist and NDBARC layer in the lithographically exposed portions.
一种负可展性底部防反射涂层(NDBARC)材料,包括含有脂肪族醇基团、芳香基团和羧酸基团的聚合物。NDBARC组合物在涂覆和烘烤后,不溶于典型的抗蚀剂溶剂,如丙二醇甲醚乙酸酯(PGMEA)。NDBARC材料还包括光酸发生剂,以及可选的交联化合物。在NDBARC材料中,羧酸提供了开发剂的溶解性,而仅有醇,仅有羧酸或它们的组合提供了对PGMEA的抗性。NDBARC材料具有抗抗蚀剂溶剂的性能,因此,在涂覆NDBARC时,NDBARC和抗蚀剂之间不会发生混合。经过曝光和烘烤后,负光刻胶和NDBARC层的光刻曝光部分由于聚合物的化学增强交联而变得不溶于开发剂。