申请人:Atotech Deutschland GmbH
公开号:EP3470552A1
公开(公告)日:2019-04-17
The present invention relates to an acidic aqueous composition for electrolytically depositing a copper deposit, the composition comprising
(i) copper (II) ions,
(ii) one or more than one compound of formula (la)
(iii) one, two, three or more than three further compounds, which are different from the compound of formula (la),
with the definitions given throughout the text, the use of the acidic aqueous composition for electrolytically depositing a copper deposit, the use of the compound of formula (la) as surfactant in preferably an acidic aqueous composition, a method for electrolytically depositing a copper deposit onto a substrate, and a compound of formula (la), preferably a specific compound derived from formula (la).
本发明涉及一种用于电解沉积铜沉积物的酸性含水组合物,该组合物包括
(i) 铜 (II) 离子、
(ii) 一种或多种式(la)化合物
(iii) 一种、两种、三种或三种以上不同于式(la)化合物的其他化合物、
使用酸性水性组合物电解沉积铜沉积物,在优选的酸性水性组合物中使用式(la)化合物作为表面活性剂,将铜沉积物电解沉积到基底上的方法,以及式(la)化合物,优选由式(la)衍生的特定化合物。