The present invention relates to a polishing composition used in application in which a polishing object having a cobalt element-containing layer is polished, including: a cobalt dissolution inhibitor; and a pH adjusting agent, wherein the polishing composition has a pH of 4 or more and 12 or less, and the cobalt dissolution inhibitor is at least one member selected from the group consisting of an organic compound having an ether bond, an organic compound having a hydroxyl group, an organic compound having a carboxyl group and having a molecular weight of 130 or more, and salts thereof. According to the present invention, there is provided a polishing composition capable of suppressing the dissolution of a cobalt element-containing layer when a polishing object having a cobalt element-containing layer is polished.
本发明涉及一种用于抛光具有含
钴元素层的抛光对象的抛光组合物,包括:
钴溶解
抑制剂;和pH值调节剂,其中抛光组合物的pH值为4或以上和12或以下,
钴溶解
抑制剂为至少一种选自以下组成的成员:具有醚键的有机化合物、具有羟基的有机化合物、具有羧基且分子量为130或以上的有机化合物及其盐类。根据本发明,提供了一种抛光组合物,能够在抛光具有含
钴元素层的抛光对象时抑制含
钴元素层的溶解。