申请人:Watanabe Hitoshi
公开号:US20050100815A1
公开(公告)日:2005-05-12
The process for producing a photoresist polymeric compound of the present invention is characterized by a process for producing a photoresist polymeric compound having a repeated unit corresponding to at least one monomer selected from a monomer (a) having a lactone skeleton, a monomer (b) having a group which becomes soluble in alkali by elimination with an acid and a monomer (c) having an alicyclic skeleton having a hydroxyl group, wherein the process comprises the step of; (i) the polymerization step (A) polymerizing a mixture of monomers containing at least one monomer selected from the above monomers (a), (b) and (c), and the extraction step (B) of extracting a polymer formed in the polymerization by using an organic solvent and water to partition the formed polymer into an organic solvent layer and a metal component as an impurity into an aqueous layer, or (ii) the step (I) passing a polymer solution, which contains a polymer having a repeated unit corresponding to at least one of the above monomers (a), (b) and (c), and a metal content of which is 1000 ppb by weight or less relative to the polymer, through a filter comprising a porous polyolefin membrane having cation-exchange group. The method of the present invention can efficiently provide a photoresist polymeric compound having an impurity content such as metal of extremely low.
本发明的光刻胶聚合化合物的生产工艺,其特征在于生产具有重复单元的光刻胶聚合化合物的工艺,该重复单元对应于至少一种单体,该单体选自具有内酯骨架的单体(a)、具有通过与酸消除而变得可溶于碱的基团的单体(b)和具有具有羟基的脂环族骨架的单体(c),其中该工艺包括以下步骤;(i) 聚合步骤(A)聚合含有至少一种选自上述单体(a)、(b)和(c)的单体的混合物,提取步骤(B)使用有机溶剂和水提取聚合中形成的聚合物,将形成的聚合物分成有机溶剂层和作为杂质的金属组分的水层、或 (ii) 步骤(I)将聚合物溶液通过由具有阳离子交换基团的多孔聚烯烃膜组成的过滤器,该聚合物溶液含有与上述单体(a)、(b)和(c)中至少一种单体相对应的重复单元,且相对于聚合物的金属含量为 1000 ppb 或更少(按重量计)。本发明的方法可以有效地提供杂质(如金属)含量极低的光刻胶聚合物化合物。