METHOD FOR PRODUCING ARTICLE COATED WITH PATTERNED FILM AND PHOTOSENSITIVE COMPOSITION
申请人:Nippon Sheet Glass Co., Ltd.
公开号:EP1160625A1
公开(公告)日:2001-12-05
There can be provided a method for producing a pattern film-coated article which has excellent film formability, can remove unexposed portions of a film completely in the development step after exposing the film to light, and has excellent pattern accuracy; and a photosensitive composition.
The method for producing a pattern film-coated article comprises the steps of coating a photosensitive composition comprising an organometallic or organosilicon compound having photosensitivity and a hydrolyzable metal or silicon alkoxide on a substrate, irradiating the coated film on the substrate with light to polymerize the exposed portions of the coated film and then dissolving unexposed portions to remove them, wherein a pattern film-coated article is produced from an allyl group-containing metal or silicon alkoxide as the organometallic or organosilicon compound.
本发明提供了一种生产图案涂膜制品的方法,该方法具有优异的成膜性,在胶片曝光后的显影步骤中可以完全去除胶片的未曝光部分,并且具有优异的图案精度;还提供了一种感光组合物。
生产图案涂膜制品的方法包括以下步骤:在基底上涂布由具有感光性的有机金属或有机硅化合物和可水解的金属或硅烷氧基化合物组成的感光组合物,用光照射基底上的涂膜,使涂膜的曝光部分聚合,然后溶解未曝光部分以去除它们,其中图案涂膜制品是用含烯丙基的金属或硅烷氧基化合物作为有机金属或有机硅化合物生产的。