申请人:Liu Gang-Yu
公开号:US20050221081A1
公开(公告)日:2005-10-06
Self-assembled monolayers and other solid support/surface-layer systems are widely used as resists for nanofabrication because of its closely packed structure, low defect density, and uniform thickness. However these resists suffer the drawback of low stability in liquid due to desorption and/or oxidation induced desorption. Stabilized solid support/surface-layer systems and methods of preserving the integrity and structure of self-assembled monolayers on solid surfaces are provided. The method involves adding small amount of amphiphilic molecules, such as DMF and DMSO, into aqueous solutions as preserving media. These molecules adhere favorably to defect sites within monolayers and inhibit the initiation of both known degradation pathways: oxidation and desorption. Also provided are stabilized systems including the solid support/surface-layer system and stabilizing solution, as well as kits of stabilizing solutions for use with various systems.
自组装单层和其他固体支撑/表面层系统因其结构紧密、缺陷密度低和厚度均匀而被广泛用作纳米制造的抗蚀剂。然而,由于解吸和/或氧化引起的解吸,这些抗蚀剂存在在液体中稳定性低的缺点。本研究提供了稳定的固体支持物/表面层系统以及在固体表面保持自组装单层的完整性和结构的方法。该方法包括在水溶液中加入少量两亲分子,如 DMF 和 DMSO,作为保存介质。这些分子能很好地附着在单层表面的缺陷部位,并抑制氧化和解吸这两种已知降解途径的发生。此外,还提供了包括固体支持物/表面层系统和稳定溶液在内的稳定系统,以及用于各种系统的稳定溶液套件。