Borocyclic radicals with highly conjugated aromatics were generatedfrom orthoquinone-containing polycyclic aromatic compounds by trapping the photoinduced triplet state with simple boron halide under irradiation with light of appropriate wavelength. The picene-based borocyclic radical was remarkably stable when stored at 23 °C in a desiccator for over 1 year. The crystal structure of this stable radical
A POLYMER, COMPOSITION, FORMING SACRIFICIAL LAYER AND METHOD FOR SEMICONDUCTOR DEVICE THEREWITH
申请人:AZ Electronic Materials (Luxembourg) S.a.r.l.
公开号:US20190048129A1
公开(公告)日:2019-02-14
The present invention relates to a polymer, composition, the forming of a sacrificial layer and a method for producing a semiconductor device comprising a step during which a pattern is made using a photoresist by the photolithography method.
[EN] A POLYMER, COMPOSITION, FORMING SACRIFICIAL LAYER AND METHOD FOR SEMICONDUCTOR DEVICE THEREWITH<br/>[FR] POLYMÈRE, COMPOSITION, FORMATION DE COUCHE SACRIFICIELLE ET PROCÉDÉ DE PRODUCTION D'UN DISPOSITIF SEMI-CONDUCTEUR AVEC CETTE COUCHE
申请人:AZ ELECTRONIC MAT (LUXEMBOURG) S À R L
公开号:WO2017137142A1
公开(公告)日:2017-08-17
The present invention relates to a polymer, composition, the forming of a sacrificial layer and a method for producing a semiconductor device comprising a step during which a pattern is made using a photoresist by the photolithography method.