A fluorinated ester monomer is provided having formula (1) wherein R1 is H, CH3 or CF3, R2 and R3 are H or a monovalent hydrocarbon group, or R2 and R3 forms a hydrocarbon ring, R4 is a monovalent hydrocarbon group, and k is 0 or 1. A polymer obtained from the monomer has transparency to radiation with a wavelength of up to 200 nm and appropriate alkaline hydrolysis, is constructed such that any of water repellency, water slip and surface segregation may be adjusted by a choice of its structure, and is useful in forming ArF immersion lithography materials.
提供一种具有公式(1)的
氟化酯单体,其中R1为H、
CH3或
CF3,R2和R3为H或单价烃基,或R2和R3形成烃环,R4为单价烃基,k为0或1。从该单体获得的聚合物具有对波长高达200纳米的辐射透明度和适当的碱性
水解性能,其结构可以通过选择进行任何的防
水性、
水滑性和表面分离调整,并且在形成ArF浸没光刻材料方面非常有用。