The invention provides a composition for forming a titanium-containing underlayer film comprising: as a component (A), a titanium-containing compound obtained by reacting a divalent or a trivalent alcohol represented by the following general formula (A-2) to one or more kinds of compounds selected from a titanium compound represented by the following general formula (A-1) and a titanium-containing compound obtained by hydrolysis and/or condensation of the titanium compound and as a component (C), solvent. There can be provided a composition for forming a titanium-containing underlayer film that is excellent in storage stability without changes in characteristics, pattern adhesiveness relative to a fine pattern, and etching selectivity relative to conventional organic film and silicon-containing film.
Ti(OR1A)4 (A-1)
R2A(OH)2 (A-2)
该发明提供了一种用于形成含
钛底层膜的组合物,包括:作为组分(A),通过将下述一般式(A-2)表示的二价或三价醇与下述一般式(A-1)表示的
钛化合物之一或
钛化合物的
水解和/或缩聚产物中的一种或多种化合物反应而获得的含
钛化合物;以及作为组分(C)的溶剂。可以提供一种形成含
钛底层膜的组合物,其在储存稳定性、特性变化、与细微图案的附着性以及相对于传统有机膜和含
硅膜的蚀刻选择性方面表现出色。Ti(OR1A)4(A-1)R2A(OH)2(A-2)