申请人:Akita Makoto
公开号:US20090004600A1
公开(公告)日:2009-01-01
A chemically amplified positive resist composition comprising
(A) a resin which comprises (i) a polymerization unit represented by the formula (I):
wherein R
7
represents a hydrogen atom etc., R
8
represents a C1-C4 alkyl group, p represents an integer of 1 to 3, and q represents an integer of 0 to 2,
(ii) at least one polymerization unit selected from a group consisting of a polymerization unit represented by the formula (II):
wherein R
1
represents a hydrogen atom etc., R
2
represents a C1-C8 alkyl group and ring X represents an alicyclic hydrocarbon group, and a polymerization unit represented by the formula (IV):
wherein R
3
represents a hydrogen atom etc., R
4
and R
5
independently represents a hydrogen atom etc., R
10
represents a C1-C6 alkyl group etc., and
(iii) a polymerization unit represented by the formula (III):
wherein R
3
, R
4
and R
5
are the same as defined above, E represents a divalent hydrocarbon group, G represents a single bond etc., Z represents a carbonyl group etc. and L represents an anthryl group etc., and
(B) at least one acid generator.